l = 0 nm l = 3 nm 13 90 Flow rate (Q) [aL s-1] Flow rate (Q) [aL s-1] 12 11 10 9 8 80 70 60 50 7 6 10-3 10-2 10-1 100 ε 101 102 103 40 104 10-3 10-2 l = 6 nm 10-1 100 ε 101 102 103 104 103 104 l = 12 nm 320 160 Flow rate (Q) [aL s-1] Flow rate (Q) [aL s-1] 300 280 140 260 240 120 220 100 200 180 80 160 10-3 10-2 10-1 100 ε 101 102 103 104 10-3 10-2 10-1 100 ε 101 102